A subcritical or supercritical water is used to selectively etch a silicon nitride film against a silicon dioxide film or to selectively etch a silicon dioxide film against a crystalline silicon region. The system may be applied to more than one substantially different counseling program each based on a common redundant counseling track. Thus, when starting up the engine, the control apparatus makes up for a shortage of power by executing overload driving of the motor for a short time period. According to the present invention, the first communication hole defined by the support pin for supporting the contacts are utilized as the insertion holes of the probe for the connector conduction test, so that production efficiency of the connector can be improved.