Projection lenses and projection lens systems are telecentric between an illumination subsystem and a set of imagers. A phase comparator compares, in phase, an input digital signal with a clock signal that has already been generated. A device for carrying out the method includes a substrate support for holding at least one substrate, which can be moved along an Y-axis and an X-axis, and an ion beam source for generating an ion beam, which is perpendicular to the surface to be processed of the substrate in the Z-axis or which may be arranged in an axis, inclined in relation to the Z-axis. Alternatively, slop parameters associated with a spread order may also apply more restrictive slop parameters to orders within the same adjustable range.