The present invention relates to an EUV pod having marks, which comprises a mask pod and one or more mark disposed on the mask pod. A main surface, on the side where a thin film for a transfer pattern is to be formed, of the mask blank substrate has a flatness of 0. Oil leaked from the oil port is purged by pressurized air through an annular cavity formed between the oil transfer and heat shield tubes, and is discharged out of the MTF. If the syndromes of the corrected word of the first decoding are not all zeros, a second decoding is performed by error decoding and erasure for the number of errors reduced by one and the number of erasures increased to two. Methods of dispensing a medicament to a patient are also disclosed, as are variations of the pump system.