In accordance with a method of the invention, host data, accompanied by host LBA, is received from a host. Further, a stacked transducer array comprising an electronic device disposed in a first layer, a substrate including a front side and a backside, an electrical interconnect layer disposed on the substrate and a plurality of transducers disposed in a third layer where the transducers are electrically coupled to the electronic device disposed in the first layer. When the VIU is within wireless range of a gateway, it establishes a WiFi connection with the gateway, and submits stored DPRs to the gateway, to be stored in permanent storage at the gateway. The inspection data is generated by comparing images of the reticle generated for different values of a lithographic variable.