A process for manufacturing a MOS device and the MOS device manufactured thereby are disclosed. The phosphor containing silicon, magnesium, and chlorine, and activated with europium and capable of emitting green light, in which the molar ratio of chlorine to magnesium is in a range of 1. Present on the loads is a mechanism, which is connected to the locking device for the purpose of locking or releasing the loads, in conjunction with a cargo vehicle, which can be driven between the lanes, is so arranged as to actuate the mechanism when the cargo vehicle passes the mechanism. The photons are monitored from deep tissues of the animal.