Systems and methods for migrating file locks in distributed file systems. A substrate is transferred while being rolled around the respective deposition rollers of the respective deposition chamber units, and the deposition chamber units decompose source gas by plasma generated near the deposition rollers by application of voltage to the deposition rollers to perform deposition processing on the substrate on the deposition rollers. These panels are joined to each other so that a closed cross section is formed of the inner panel and the reinforcing inner panel at the lower part of a joined part between the outer panel and the inner panel and a closed cross section is formed of the outer panel and the inner panel at the upper part of a joined part between the inner panel and the reinforcing inner panel. Moreover, the inventive technique obviates the need to manually configure a router to support a particular capability and interoperate correctly within a network of routers that both support and are unaware of the capability.