A switching circuit is provided on a high frequency line forming a switch. The projection system comprises an array of lenses arranged to receive the patterned beam, divide the patterned beam into a plurality of substantially polygonal portions, and focus each substantially polygonal portion to form a respective radiation spot on the target portion of the substrate. Once the second stage motion aspects of the target are estimated, a three-dimensional image of the target may be generated. The article is artificially aged at the first temperature for a duration of at least 30 minutes.