A combination tissue coagulation and cutting apparatus, system and method for coagulating and cutting tissue. In order to minimize the power consumption and to enable a fast start up of the circuit resuming the previous states, it is proposed that it further comprises a non-volatile storage component. The capping layer allow the use of a selective oxidation process, which may be a wet oxidation process utilizing partial pressures of both H2O and H2 in an H2-rich atmosphere, to oxidize portions of the substrate and metal gate pattern while suppressing the oxidation of metal layers that may be included in the metal gate pattern.