Methods, systems and computer readable media for dynamically controlling a time period of ion detection by an ion detector of a mass spectrometer. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an inputoutput station configured to support at least one microelectronic workpiece for automatic transfer to and from the processing stations. The multi-channel audio signal from the microphones may be processed by a beamforming network to generate a single-channel enhanced audio signal, on which voice activity is detected. The intermetal dielectric formed of multiple low-k dielectric layers provides advantageous electrical and mechanical properties.