A sensor module having a heating structure and a sensor element is described. In order to promote the formation of the low ohmic phase of titanium silicide, the pregion is formed by implanting B ions and BF2 ions into the silicon body in a ratio between 1:4 and 4:1. The capsule, radiation source, and IORT applicator arm would be integrated to enable a physician, physicist or technician to interactively internally view and select tissue for exposure to ionizing radiation in sufficient quantities to deliver therapeutic radiation doses to tissue. The set date may be a current or future date.