1461102877-fcce3838-bef7-4ef4-8b32-2954b778f34c

In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. The first inflatable portion, which includes a first inclined sliding surface, is configured to provide downward egress from an over-wing exit. The printed wiring board further includes a solid core conductive material interconnecting the conductive foils.