A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The anterior surface has a surface area. The piezoelectric is preloaded in compression by the resonator. A memory-function film is formed on both sides of a gate electrode in the semiconductor storage device. The clutch is closed with no connection to the energy supply and is opened with connection established. Also disclosed and claimed is a method of treating a variety of cancers in a patient comprising administering to said patient the dosing regimen of the invention.