Devices utilize elements carried by a fluid in a microchannel to switch, attenuate, shutter, filter, or phase shift optical signals. Multiple exposures and sweeps across a substrate using the mask results in the reduction of seam lines in the final developed photosensitive or micro formed structures. Dual workfunction high-performance support MOSFETsEDRAM arrays having a gate conductor guard ring andor local interconnections are also provided. Close matches are reported to the parties involved, and if desired a channel of communication is set up.