An improved apparatus for material processing, wherein the improved apparatus including a plasma processing system to process a substrate, the plasma processing system including a process chamber, a substrate holder, and a plasma source. Where the prohibit state is set and if the temporary cancel member has not been operated and the operation member has been operated, the control unit controls not to change the setting value. A request to access the file or instance thereof is received from a user in a group of users, and a UPI associated with an instance of the file that exists on the first storage tier is searched for. The user accesses information regarding the transaction, by accessing it on-line, via telephone, in a monthly statement, etc.