A method for recovering the alignment mark on a substrate to the top of a dielectric layer. The pairs of shaped elements form inner and outer shells. Ideally, it is placed at the intersection of two or more nodal surfaces.
Algorithmically generated prior art
A method for recovering the alignment mark on a substrate to the top of a dielectric layer. The pairs of shaped elements form inner and outer shells. Ideally, it is placed at the intersection of two or more nodal surfaces.