Even clusters are created based n a first metadata and second metadata of the electronic document. An information acquiring unit acquires, when a defect is detected in a current manufacturing process, information relating to the manufacturing of the product in a preceding manufacturing process from the information storing unit. A stressor layer is then formed on exposed portions of the upper surface of the base substrate and atop the edge exclusion material, A portion of the base substrate that is located beneath the stressor layer and which is not covered by the edge exclusion material is then spalled.