Transformer driven by data modulated signal provides isolated power. The electrostatic chuck is fixed onto the base plate via an adhesive layer. The analog input signal is located outside of a first Nyquist zone that is between 0 and fs2. The rotational support can have its center of rotation located substantially at the center of gravity of the vibration isolation support device. A position correction amount for correcting the comparison positions of the images is calculated on the basis of the size of the block and a position shifting pattern. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof.