To provide a method whereby a 2-azaadamantane can easily be obtained in good yield. and also avoiding deterioration of high pressure resistance of the oxide film associated with the surface roughness. The base station processes the data so that the data can be display by an ECG monitor. In one aspect, a controller may be configured to implement a pulse width modulation technique to control the OLEDs. Further, the plasma source may be used to generate activated species operable to enhance the nucleation of deposition precursors on the semiconductor surface. The optical element is kept in contact with an exposure liquid while the first table and the second table are moved from a first state in which the first table is opposite to the optical element to a second state in which the second table is opposite to the optical element.