A manufacturing method of an opto-electric hybrid module which is capable of suppressing losses in cost, and an opto-electric hybrid module obtained thereby. The drill press lathe attachment comprises a base and a power transfer box along with components commonly found on a lathe, but without a motor. The preferred embodiment of the invention provides a number of specific features. Damage in the semiconductor substrate and a sidewall of the gate electrode may be cured, or repaired, by a radical re-oxidation process to form an oxide layer on the semiconductor substrate and the gate electrode. An input terminal and an output terminal are connected to the drain and the source of the MOSFET.