The invention relates to a shrinking device for shrinking a tool into a tool holder of a tool chuck, said device comprising a heating device for heating the tool holder. The production is accomplished by returning the waste liquid generated at the step of the addition of aldehyde treating agents to the step of the absorption andor the step of separation. Over-etching of the low-breakdown-voltage transistor area LV is carried out to make the surface of the substrate 100 exposed and to define the side wall only in the low-breakdown-voltage transistor area LV. The label or permission can be delegated to a second user to enable the second user to obtain access to the service.