An object is to efficiently manufacture an organic EL display which uses microstructures. Specifically, a semiconductor device is provided including a dummy gate and a set of fin field effect transistors formed over a substrate; a spacer layer formed over the dummy gate and each of the set of FinFETs; and an epi material formed within a set of recesses in the substrate, the set of recesses formed prior to removal of an epi block layer over the dummy gate. Output from the component assessment module is sent to a component detection module.