An uppermost one of multilayered electrode pads, on which a bump and a plating coat will be formed, is made of metal having high ionization tendency, particularly, Al. The inspection method comprises providing a defect area image to an image simulator wherein the defect area image is an image of a portion of a photolithography mask, and providing a set of lithography parameters as a second input to the image simulator. The sheet feeder has two open ends to allow for the transport of stacks by a conveyor belt. Alternatively, the imaging transducer may be disposed within a removable transducer core adapted to fit within the tubular member.