A microelectronic substrate, a method of forming the same, and a system including the same. A pattern may be created on a reticle by passing an electron beam through a first aperture having a first shape comprising an upper horizontal edge, a lower horizontal edge, a vertical edge, an upper bevel, and a lower bevel, wherein a portion of the electron beam is projected onto a second aperture. 20, the content of particles smaller than 20 \u03bcm in diameter is in the range of 0% by mass to 7% by mass and smaller than 36 \u03bcm is in the range of 90% by mass to 100% by mass, and the BET specific surface area is in the range of 300 cm2g to 900 cm2g. The scan data is processed to extract the embedded information. The body member may then be released and repositioned to a different position on the touch-sensitive display screen.