A structure includes a semiconductor device formed in a substrate; an insulator adjacent to the semiconductor device; an electrical contact electrically coupled to the semiconductor device, wherein the electrical contact includes tungsten; and an electrical connector coupled to the electrical contact, wherein the electrical connector includes aluminum. This ensures that the tank pressure is maintained at a level equal to or higher than a minimum level required for braking actuation of the railway vehicle to have ride comfort when traveling along a curve and without causing braking trouble. The lithographic apparatus also includes a transfer unit comprising a single robot. The second substream is heated by the second working stream at a third heat exchanger.