A thin film balun that can be made smaller and thinner while maintaining required balun characteristics is provided. The connection between the graft vessel and the target vessel may be compliant, and may be achieved by deploying a plurality of connectors such as staples into tissue. The light module includes an electrical connector for electrically connecting the light module to an electrical conductor of the mirror assembly when the light module is positioned at least partially within the mirror casing. With the connection of the first drainage line 50, the wafer cleaning device 5 is adapted so that the supply nozzle 34 supplies APM to a surface of the wafer W again.