A method uses a lithographic apparatus to form an inspection target structure upon a substrate. A plurality of apertures extend radially through the annular wall. An external land 15 is formed on a surface of each of the first and N-th layer patterns. Accordingly, there is provided a liquid droplet jetting apparatus in which it is possible to discharge a gas inside a liquid supply channel from an upstream side of the nozzle, and also, when the degree of thickening of the liquid inside the nozzle is extreme, it is possible to discharge the thickened liquid assuredly from the nozzle.