A resonator includes a CMOS substrate having a first electrode and a second electrode. The cell includes an access transistor that is formed in a pillar of a single crystal semiconductor material. The screws include a series of outwardly projecting mixing elements preferably of pyramidal design and arrayed in a helical pattern along the length of the screws. On receiving a search command, the CPU 23 obtains the index data from the index 26i and selects the matching groups of data from the container 26c. Therefore, even when the laser beam output is raised to form a deeper hole, the hole diameter is not widened and thereby a hole for a small diameter via hole can be formed.