An exposure apparatus is made so as to have respective chambers in which a main exposure system, a substrate carrying system, and a mask carrying system are housed. The first blower unit is provided in a seat bottom of the seat and the second blower unit is provided in a backrest of the seat. The concentration ratio can be used to control the temperature of the fluidized bed reactor by controlling the amount of cool titanium tetrachloride that is introduced into the reactor. The media comes into contact with the nonconductive coating during printing of the desired image on the media.