A scanning exposure apparatus includes a masking blade provided between an optical integrator and an optical system, and which is movable in a predetermined direction on a plane perpendicular to an optical axis of the optical system. During operation of the management agent, dynamic operating information for the management software components of the management agent can be determined. Each filter cartridge module includes a volume of stationary phase particulates adjacent a porous substrate layer. The pressurization apparatus is configured to receive the substrate from the die tool and control pressure about the substrate in the pressurization chamber. A backing is disposed on a second side of the emitter and is operably connected to the cathode front member via a backing insulator.