The present invention relates to a toner for developing an electrostatic latent image comprising a binder resin, a colorant, a first wax, and a second wax whose kind is different from that of the first wax, wherein the toner is prepared by a kneading-grinding method and integrated domains of the first wax and the second wax are dispersed in the binder resin. In the process, a metal is deposited and patterned onto a silicon-containing substrate in such a way that the metal is present and touches silicon where etching is desired and is blocked from touching silicon or not present elsewhere. A light receiving and emitting probe apparatus includes the above-described light receiving and emitting probe, a scanning mechanism that allows the light receiving and emitting probe to scan over a sample, and a control circuit that causes the light receiving and emitting body of the light receiving and emitting probe to receive and emit a light. The OMA measurement value is then processed by the laser controller to obtain a modulation current control signal, which is then output to the laser driver to cause the laser driver to adjust the laser modulation current to obtain a desired or optimum laser output power level.