BioMEMSNEMS appliance biologically monitors an individual, using biosensors to detect cellular components. The variables R and R1-R12 in Formula I are described herein. An inclined guide portion is formed at a front end of the slide way. In still another embodiment, a memory device is formed by positioning columnar structures on a substrate, and interposing a floating gate between the structures that is closer to one of the structures. The semiconductor device includes a gate pattern formed at an upper part of the semiconductor substrate to overlap one side of a drift region, and a shallow oxide region disposed adjacent to the gate pattern, having a shallower depth than a plurality of device isolation layers.