A semiconductor device, methods for manufacturing the semiconductor device, and an integrated circuit including the semiconductor device are disclosed. This can provide the hydraulic bearing motor as being capable of satisfying features of exhibiting small NRRO, and vibration and shock resistance even with a thinned hydraulic bearing motor. Based on the detected position of the image of the mark, the apparatus detects the position of an object to be detected using the illumination light having passed through the corrected first aperture stop. In addition, the apparatus may include an additional memory coupled to the logic element, where the logic element is adapted to select a processor from the plurality of processors to couple with the additional memory.