Electronic marketplaces typically apply catalog schema in the format of name-value pairs to store product attribute names and values to achieve a very high degree of flexibility. The method is implemented in a metrology tool comprising a measurement table which is movable in X-coordinate direction and Y-coordinate direction. The method further includes forming a plurality of control gate electrodes across the active regions by etching the second conductive layer, forming source and drain regions in the semiconductor substrate by performing an ion implantation, and forming contacts in the drain regions.