In a hierarchical load balancing system with each layer including one or more nodes, the load balancing information for all the nodes included in the hierarchical structure is collectively managed by any of the nodes. Windings and are collectively wound around the core portions of the second subunit. While the wafer moves in the X and Y direction, a narrowly defined X-ray source illuminates the sample and the diffracted X-ray beam is monitored by the detector at a predefined angle. Finally, the receiver lead-frame array and the lead-frame matrix are connected.