Oil which will serve as a lubricating fluid of a fluid dynamic pressure bearing is degassed in a first environment under a first pressure which is lower than atmospheric pressure. Remote service is provided by any station that can be accessed through a communication network. Each of the paddles has a general \u201cS\u201d-shape defined between a top end and a bottom end of the paddle, and between a leading surface and a trailing surface of the paddle. Viewers in seats in tiered rows such that their heads are in known viewing locations. A neutral beam is irradiated on the layer to be etched on which the etching gas is adsorbed.