A method of manufacturing an electron emission element, including forming common wire electrodes on a substrate and forming electron emission units including fibrous material assemblies on the common wire electrodes, respectively, for preventing abnormal discharge caused by an antistatic film with no deterioration in characteristics of the electron emission element. The substrates surfaces can be flat or geometrically altered to include wells of receiving material. All gas contacting surfaces of the system, including one or more gas-fluid contacting devices are made from ozone-inert construction materials that generally do not absorb ozone or introduce amounts of contaminants or deleterious byproducts of oxidation into a fluid or non-fluid target from ozone oxidation.