In a SOI structure semiconductor device using a SOI substrate, a lattice distortion layer is formed by implanting Ar ions into a silicon substrate as an active layer. A notebook style display, keyboard, and pointing device attached to the switch provide a human interface. The measurement of conductive feature includes first providing a conductive feature on a surface of a substrate. A rotatable coupler is also provided. Bubbles rise upward through the aeration space disposed outside of the clarifier and around the aeration space or around the clarifier for improved mixing.