An input apparatus or keypad for computers and networks is provided. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment. The invention further relates to hybrid rice seeds and plants produced by crossing the cultivar M-105 with another rice cultivar. A frame nas four vertical corner pieces having a plurality of bolt hole. Thus, when each group of output drivers is calibrated, the output models used for each will compensate for process variations as may occur across the surface of the integrated circuit.