A method for forming an epitaxial layer in a capacitor over interconnect structure, includes selecting a laser having a suitable wavelength for absorption at a seeding layerannealing layer interface of the capacitor over interconnect structure, and directing laser energy from the selected laser at the capacitor over interconnect structure. The valve assembly includes a valve that is moveable between two positions. Such access can be provided by swinging the door open on hinges like a standard door.