A package with two or more stacked semiconductor chips and a method of manufacturing the same. An intake port of an intake silencer is set at a distance from an engine, and air suctioned from the intake port is unlikely to be affected by heat produced by the engine. A panel has a first edge, a second edge, a third edge, and a fourth edge wherein the first and second edges are positioned opposite of each other. By disposing the gardening head in a variety of fixed positions relative to the pole, a plurality of distinct gardening instruments can be created. A means to vary the magnetic force holding the kick stick to the kick stick support arm may be a movable permanent magnetic movably mounted to the kick stick support to vary the distance between the magnet and the kick stick or can be an electromagnet having a variable magnetic field. The apparatus includes a blanking unit, having a deflector capable of deflecting the charged particle beam in at least two directions, configured to control beam passage to the substrate by deflecting the charged particle beam, and a setting unit configured to set a deflection direction of the charged particle beam by the deflector.