The invention allows the fabrication of small, dense beads of dielectric materials with selected compositions, which are incorporated into a polymeric matrix for use in capacitors, filters, and the like. The squaring jig has two workpiece holders attached together by one or more support members. A hinge connects the upper and lower baffle assemblies and permits the assemblies to pivot from a closed position to an open position. In comparison with existing multiple part shields, which provide an extended RF return path contributing to RF harmonics causing stray plasma outside the process cavity, the components of the process kit reduce the RF return path thus providing improved plasma containment in the interior processing region.