A subcutaneous implantable cardiac device system applies defibrillation currents in pathways aligned with the heart’s own electrical system to decrease defibrillation thresholds. The first metering device and the second metering device are constructed differently from one another with respect to metering principles thereof. Suitable photoresists can be used in this invention to not only image a semiconductor substrate to protect areas where vias andor cavities are not desired during plasma processing but also to protect the chuck membrane of the reactive ion etcher from being damaged andor contaminated during plasma processing. The system also includes a first contact connected to a first input terminal of at least one of the power cells, a second contact connected to a second input terminal of the at least one of the power cells, and a third contact connected to first and second output terminals of the at least one of the power cells. The coating process comprises the steps of providing a substrate having a first modulus of elasticity, depositing a layer of a material having a second modulus of elasticity less than the first modulus of elasticity onto the substrate, and depositing a coating over the material layer.