The present invention provides a salt represented by the formula :wherein P1, P2, P3, Q1, Q2 and R are defined in the specification and the present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula. The application discloses JNK inhibitors, as described below in Formula I:wherein the variables are as defined herein. An imprinter is positioned above the conveyor and adjacent the stop gate. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect.