A multipurpose connector made in two pieces and having three distal connectors and two proximal connectors arranged concentrically in one another and coaxially to one another and made differently and having a venting passage. The sensor includes a membrane supported by the surface for efficiently transmitting sound energy through the housing and a rigid nipple engaging the membrane. The substituted or unsubstituted aromatic hydrocarbon cyclic group has none of anthracene skeleton, pyrene skeleton, aceanthrylene skeleton and naphthacene skeleton. The electrostatic chuck has a two-layer structure including an upper circular part and a lower circular part having a diameter larger than that of the upper circular part. The Resolution Parameter Modifier updates the resolution dependent parameter in accordance with the second resolution.