A chip and a chip package can transmit information to each other by using a set of converters capable of communicating with each other through the emission and reception of electromagnetic signals. Other embodiments are also disclosed. On that occasion, the video disk player continuously plays back the audio data of the specific music piece recorded in the buffer memory regardless of change-over of the video data. 6 microns, compared to a pitch of 100 microns available with today’s Ball Grid Array technology. A position control system controls the position of the support structure and the substrate table on the basis of the position measurement of the interferometer system. The shutoff valve permits fluid flow from the system pressure source through the connection and to the control valve during a regeneration phase of the system.