A liquid crystal display device is provided with a pixel area on a substrate having plural gate lines, plural drain lines, plural thin film transistors and plural pixel electrodes corresponding to the plural thin film transistors, and a drive circuit area disposed at a periphery of the substrate and having a drive circuit for driving the plural thin film transistors. A first end portion of each arm in the pair of arms is coupled to an opposite end of the chin support. Preferably, a surface roughness Ra of the interface of the piezoelectric layer contacting the internal electrode layer is not more than 0. The hardened molecular sieve catalyst is highly attrition resistant. In another embodiment, an apparatus for generating gas includes a canister having a tube that directs a carrier gas flowing into the canister away from a precursor material disposed within the canister.