A method for optimizing alignment performance in a fleet of exposure systems involves characterizing each exposure system in a fleet of exposure systems to generate a set of distinctive distortion profiles associated with each exposure system. The memory address and decode circuits includes a number of address lines and a number of output lines such that the address lines and the output lines form an array. To obtain an enhanced radiance, it is proposed that the primary target comprises a liquid metal channel arranged in a radial direction relative to a central axis, and that a liquid metal circulates in the liquid metal channel during operation of the X-ray source in the radial direction from an inner side to an outer side of the ring-shaped primary target.