It is intended to enable simultaneous formation of concave capacitor storage electrodes and a convex bit contact plug electrode and thereby makes it possible to reduce spaces of margins for alignment errors by decreasing the number of lithography steps. The substrate is placed within a reaction chamber; and heated. The sliding member moves back-and-forth along an axial direction of the spool shaft by rotation of the worm shaft. On the other hand, in a pitch-angle control unit, a pitch angle of the windmill blades for controlling the output to be a predetermined value is calculated, and the pitch angle is output as a blade-pitch-angle command \u03b8* for output control.