In a method of manufacturing a semiconductor device, a passivation film made of a polyimide resin film is formed on a front surface of a semiconductor wafer including a scribe line and an outer circumferential portion. The reticle is first retrieved from a storage facility with an end effector having an reticle plate coupled to a mounting plate. Additional methods and corresponding systems are contemplated. The bank deposit generator is adapted to identify one or more cash-in transactions of the plurality of transactions according to selectable criteria and to associate the one or more cash-in transactions to a bank deposit transaction based on a correlation between the associated information and the selectable criteria. More specifically, the difference between the nominal fuel quantity and the estimated fuel quantity is used to calculate a correction factor by which to correct the nominal fuel quantity. The intervening wall separates the primary chamber from the casing chamber.