A machine has a capacitor switch for switching between a side to drive a first fixing heater by a capacitor, and a side to charge the capacitor. The passive-adaptive indentor has a first member that includes a first working end that is configured to create a first residual stress field that extends to a predetermined depth in the material. A pair of hard-metal insert parts fixed to the front face are each formed with a projecting linear edge extending longitudinally parallel to but offset from the plane. The invention is particularly useful in interconnect structure comprising low-k dielectric material for the inter-layer dielectric and copper for the conductors.